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IC Bumping Mask Specification

1、Mask size

Quartz Soda Lime
3"×5" 9012(228.6×228.6×3.0)
5009 14"×14"×3.0/4.8
6025  
7012  
9012  

 

2、Quartz Mask Specification (Unit: um)

Grade C B A
Min Pattern 1.5 2.5 3
CD ±0.1 ±0.15 ±0.25
Total Pitch ±0.2 ±0.2 ±0.25
Defect <2 <2 <2

 

3、Soda Lime Mask Specification (Unit: um)

Grade C B A
Min Pattern 3 3 5
CD ±0.25 ±0.3 ±0.5
Total Pitch ±0.5 ±0.5 ±0.5
Defect <5.0 <5.0 <5.0

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