LMM series large area and high precision space and line width measuring machine ensures the precision of line width and sheath measurement precision by manually measuring or automatically doing line width and registration measurement on work piece circuit according to the designed measurement procedure. The measurement accuracy can be up to 5 nm
Areas of application:
1. FPD (such as LCD, PDP, OLED), IC encapsulation, high precision PCB (HDI, BGA, CSP, etc.), photomask, mold and other base board precision measurement in electronics industry.
2. Line, seam width, diameter, roundness, ring width and other small size precision measurement.