LMM seam width (CD) measuring machine
LMM series large-area high-precision line width measuring machine, through manual or according to the design of the measurement program automatically to the workpiece line width and overlay measurement, to ensure that the line width and overlay accuracy, measurement accuracy can reach 5nm
Application areas:
1.FPD(LCD, OLED, PDP, etc.), IC packaging, high-precision PCB (HDI,BGA, CSP, etc.), Photomask, mold and other electronic industry substrate precision measurement.
2. Line, seam width, circle diameter, roundness, ring width and other small size precision measurement.
