TFT Mask Specifications

TFT Mask Specifications

1、Normal Mask size (Unit: mm)

TFT ARRAY TFT CF
152.4 × 152.4 × 6.4 450 × 550 × 5.0
330 × 450 × 5.0 508 × 609.6 × 5.0
390 × 610 × 6.0 700 × 800 × 8.0
520 × 610 × 10.0 800 × 920 × 8.0/10.0
520 × 800 × 10.0 800 × 960 × 8.0/10.0
800 × 920 × 10.0 850 × 1200 × 10.0
850 × 1200 × 10.0 850 × 1400 × 10.0
1220 × 1400 × 13.0 1220 × 1400 × 13.0

 

2、CD Specification (Unit: um)

Grade GTM C B A
TFT ARRAY ±0.1 ±0.2 ±0.35 /
TFT CF 0.2 ±0.35 ±0.50 ±0.75

 

3、LTPS Mask Specification (Unit: um)

CD MTT CD Uniformity Registration
0.1 ±0.1 ±0.3

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