1, Constant temperature and humidity:

Temperature: 23 + / - 0.5 ℃ (grade 10 clean room), 23 + / - 0.3 ℃ (grade 1 purification room)

Humidity: 50 + / - 5% RH

2, super purification:

Most area: grade 10 purification

Local area: grade 1 purification (dust particle over 0.5 micron diameter mustn’t be more than 1 diameter).

Photomask making requirements on Production Staff: 

1 Stable state of mind, can keep calm at any time during the operation.

2 Any detail of statements and actions can meet the purification requirements.

3 Skilled operation skills, any small action should be right every time.