Environmental requirements for photomask fabrication:
1. Constant temperature and humidity:
Temperature: 23±0.5 ℃ (Grade 10 purification room),23±0.3 ℃ (Grade 1 purification room)
Humidity: 50±5% RH
2. Super purification:
Most areas: 10 levels of decontamination
Local area: Level 1 purification (the number of dust particles larger than 0.5 microns in diameter cannot exceed 1 per cubic foot of space).
Requirements for photomask maker:
1, the state of mind is stable, can keep calm at any time during the operation.
2. Any details of words and deeds meet the purification requirements.
3, skilled operation skills, any subtle action is done right again and again.
