1, Constant temperature and humidity:
Temperature: 23 + / - 0.5 ℃ (grade 10 clean room), 23 + / - 0.3 ℃ (grade 1 purification room)
Humidity: 50 + / - 5% RH
2, super purification:
Most area: grade 10 purification
Local area: grade 1 purification (dust particle over 0.5 micron diameter mustn’t be more than 1 diameter).
Photomask making requirements on Production Staff:
1 Stable state of mind, can keep calm at any time during the operation.
2 Any detail of statements and actions can meet the purification requirements.
3 Skilled operation skills, any small action should be right every time.