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Copy mask Specification
1、Mask size (Unit: mm)
Soda lime: 3006、4009、5009、6009、6012
Quartz：5009、6009
2、Mask Specification (Unit: um)
| Grade | E | D | C | B | A |
| CD | ±0.50 | ±0.75 | ±1.0 | ±1.5 | ±2.0 |
| Defect | <10.0 | <10.0 | <10.0 | <10.0 | <10.0 |