Touch Panel Mask 规格
1、Mask size (Unit: mm)
| Soda Lime | Quartz |
| 420 × 520 × 3.0/4.8 | 420 × 520 × 5.0 |
| 450 × 550 × 3.0/4.8 | 450 × 550 × 5.0 |
| 508 × 609.6 × 4.8 | 508 × 609.6 × 5.0 |
| 620 × 720 × 7.8 | 700 × 800 × 8.0 |
| 700 × 800 × 7.8 | 800 × 920 × 8.0 |
| 800 × 860 × 7.8 | 800 × 960 × 8.0 |
| 850 × 1200 × 9.8 | 850 × 1200 × 10.0 |
| 850 × 1400 × 9.8 | 850 × 1400 × 10.0 |
2、Soda lime Mask Specification (Unit: um)
| Grade | E | D | C | B | A |
| Node | In cell/On cell | On cell | OGS | OGS/ (G/G) | OGS (G/F) |
| CD | ±0.50 | ±0.75 | ±1.0 | ±1.5 | ±2.0 |
| Total Pitch | ±1.5 | ±1.5 | ±2.0 | ±3.0 | ±3.0 |
| Defect | <5.0 | <5.0 | <5.0 | <10.0 | <10.0 |
3、Quartz Mask Specification (Unit: um)
| Grade | E | D | C | B | A |
| Node | In cell | In cell/On cell | On cell | On cell/OGS | OGS |
| CD | ±0.35 | ±0.50 | ±0.50 | ±0.75 | ±1.0 |
| Total Pitch | ±0.75 | ±0.75 | ±1.0 | ±1.0 | ±2.0 |
| Defect | <3.0 | <5.0 | <5.0 | <5.0 | <5.0 |
